Author:
Smith J.H.,Montague S.,Sniegowski J.J.,McWhorter P.J.
Publisher
Office of Scientific and Technical Information (OSTI)
Cited by
23 articles.
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1. Micro Electro-Mechanical Systems (MEMS);Handbook of Integrated Circuit Industry;2023-11-28
2. Novel pure‐metal tri‐axis CMOS‐MEMS accelerometer design and implementation;Micro & Nano Letters;2021-08-26
3. CMOS 3-D-Integrated MEMS Sensor;CMOS Integrated Lab-on-a-Chip System for Personalized Biomedical Diagnosis;2018-04-16
4. MEMS/NEMS Devices and Applications;Springer Handbook of Nanotechnology;2017
5. CMOS MEMS Fabrication Technologies;Encyclopedia of Nanotechnology;2016