FTIR-ATR Evaluation of Organic Contaminant Cleaning Methods for SiO2 Surfaces-Reference-Cited by-同舟云学术

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FTIR-ATR Evaluation of Organic Contaminant Cleaning Methods for SiO2 Surfaces

Published:2003 Issue:11 Volume:19 Page:1557-1559
ISSN:0910-6340
Container-title:Analytical Sciences
language:en
Short-container-title:Anal. Sci.

Author:

SHINOZAKI Akihito¹,ARIMA Kenta¹,MORITA Mizuho¹,KOJIMA Isao²,AZUMA Yasushi²

Affiliation:

1. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University

2. Materials Characterization Division, National Metrology Institute of Japan (NMIJ)

Publisher

Springer Science and Business Media LLC

Subject

Analytical Chemistry

Link

http://www.jstage.jst.go.jp/article/analsci/19/11/19_11_1557/_pdf

Reference8 articles.

1. XRR and XPS studies of SiO2 thin films formed by r.f. magnetron sputtering

2. 4. K. Nishimura, S. Urave, and M. Morita, Proceedings of the 9th International Conference on Production Engineering, Osaka, 1999, 421.

3. 5. S. Morita, T. Okazaki, K. Nishimura, S. Urabe, and M. Morita, Extended Abstracts of International Workshop on Gate Insulator, Tokyo, 2001, 110.

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