1. Study on the determination of contamination by Cu particles on silicon wafer surfaces
2. 2. T. Shimono, M. Morita, Y. Muramatsu, and M. Tsuji, in “Device Degradation by Metallic Contamination, and Evaluation and Cleaning of Metallic Contaminants”, the Proceedings of the 8th Workshop on ULSI Ultra Clean Technology, 1990, Tokyo, 59.
3. 4. X. Zhang, A. M. Garcia-Campana, and W. R. G. Baeyens, in “Application of Chemiluminescence in Inorganic Analysis”, ed. A. M. Garcia-Campana and W. R. G. Baeyens, 2001, Chap. 6 (Chemiluminescence in Analytical Chemistry), Marcel Dekker, Inc., New York, 128 - 129.
4. 5. A. K. Campbell, “Chemiluminescence: Principles and Applications in Biology and Medicine”, 1988, Chap. 7, VCH, Chichester, England, 374.