Author:
Zhang Wen-Tao ,Zhu Bao-Hua ,Wang Jie-Jun ,Xiong Xian-Ming ,Huang Ya-Qin ,
Abstract
Based on semi-classical theory, a model of the interaction between neutral atoms and the laser standing wave field is established in this paper. The trajectories and the deposition characteristics are analyzed under channel effect, and the values of full width at half maximum of nano-grating are 0.532, 12.16 and 96.70 nm when the divergence angle, spherical and chromatic aberration are discussed, respectively. The simulation results show that the contrast of the stripe decreases with the increasing of divergence angle of the atomic beam. Also, the contrasts of the stripe are 85.2:1 and 5.33:1 when the divergence angles equal 0.1 and 0.3 mrad. When divergence angle increases over 0.5 mrad, the splitting of the stripe takes place, leading to the degradation of the deposition.
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy
Reference10 articles.
1. Zhang W T, Zhu B H 2010 Acta Phys. Sin. 59 5392 (in Chinese) [张文涛, 朱保华 2010 物理学报 59 5392]
2. Prentiss M, Timp G, Bigelow N 1992 Appl. Phys. Lett. 60 1027
3. Anderson W R, Brandley C C, McClelland J J 1999 Phys. Rev. A 59 2476
4. Camposeo A, Cervelli F, Tantussi F 2003 Mater. Sci. Engineer. C 23 1087
5. Cai W Q, Li Q W 1994 Acta Phys. Sin. 48 611 (in Chinese) [蔡惟泉, 李全文 1994 物理学报 48 611]