1. Zhao Y, Mao M, Horowitz R, Majumdar A, Varesi J, Norton P, Kitching J 2002 J. MEMS 11 136
2. Mao M, Perazzo T, Kwon O, Majumdar A, Varesi J, Norton P 1999 Proc. IEEE MEMS 100
3. Ishizuya T, Suzuki J, Akagawa K, Kazama T 2001 J. I. Image Inform. Television Eng. 55 304
4. Ishizuya T, Suzuki J, Akagawa K, Kazama T 2002 Proc. IEEE MEMS 578
5. Wu M, Cook J, DeVito R, Li J, Ma E, Murano R, Nemchuk N, Tabasky M, Wagner M 2005 Proc. of SPIE 5783 496