Author:
Li Xiao-Na ,Nie Dong ,Dong Chuang ,Ma Teng-Cai ,Jin Xing ,Zhang Zhe ,
Abstract
Iron silicidefilmshavebeensynthesizedbymetalvaporvacuumarc (MEVVA)ionimplantationofironinto (1 1 1 )and
(1 0 0 )orientedsiliconwafers.Thestructureevolutionwascharacterizedusingtransmissionelectronmicroscopy (TEM)andhighresolutionelectronmicroscopy (HREM) .TheβFeSi2filmsandburiedlayerswithdifferentdepthandthicknesswereobtainedbyadjustingtheimplantationenergyanddose .Theformationofα,β,γandCsCl FeSi2 phaseshavebeenobserved .ThephasetransitionorderisγFeSi2→βFeSi2→αFeSi2,CsClFeSi2→βFeSi2→αFeSi2 or βFeSi2→αFeSi2.Anamorphouslayerwasformedat60kVand 4× 1 0 1 7ions cm2 ,thephasetransitionorderisamorphous→β FeSi2 →α FeSi2 .Themorphologyandpositionofthesilicidefilmschangewiththeannealingtemperature.Thesilicidegrainsgrowwithincreasingannealingtemperaturewithfurtherincreaseoftemperature ,thecontinuoussilicidelayersshrinkintoisolatedislandsandtheinterfaceβ FeSi2 Sibe comesrougher.Inthispaper,thecomplicatedorientationrelationshipsexistingbetweenβ FeSi2 andSiwerealsoinvestigated
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy
Cited by
14 articles.
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