Theoretical study of influence of substrate microdefects on optical properties of dielectric thin films

Abstract

Based on the theory of inhomogeneous thin films, a model for refractive index of stratified dielectric substrate is firstly put forward. The substrate can be divided into surface layer, subsurface layer and bulk layer in turn. Both the s urface layer and subsurface layer, whose refractive indices obey statistical dis tributions, are equivalent to inhomogeneous thin films. They can be separated in to N1 and N2 sublayers respetively which are regarded as homogenous thin films. Subsequently, theoretical analysis was carried out utili zing the characteristic matrix method of optical thin films. Numerical calculati on for optical properties of single layer dielectric thin films was carried out. The computing results indicate that microdefects in surface layer and subsurfac e layer of the substrate alter the equivalent refractive indices of the thin film and the substrate, which leads to the deviation of pseudo-Brewster angles and assembling reflectance from ideal conditions. Meanwhile, these microdefects change the propagation characteristics in thin film and substrate, as a result t he phase shift of reflection and phase difference deviate from ideal conditions. In addition, this model is also suitable for calculating the influence of micr odefects in the substrate on optical propertied of multilayer dielectric thin fi lms.