Author:
Hu Hui-Yong ,Zhang HeMing ,Dai Xian-Ying ,Lü Yi ,Shu Bin ,Wang Wei ,Jiang Tao ,Wang Xi-Yuan ,
Abstract
In this paper, static state and quasistatic state models of quantum well channel hole sheet density of SiGe pmetaloxidesemiconductor with δ doping layer are established and analyzed. The relations between hole sheet density and δ dopinglayer concentration, between holesheetdensity and undoping layer hickness at static state are also discussed, and the relations of the threshold voltage to the δ doping layer concentration, the quantum well channel hole sheet density and the thickness of the undoping layer are discussed. At last, the relation of the quantumwell channel hole sheet density to gate voltage for the quasistatic state is discussed.
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy
Cited by
8 articles.
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