Author:
CHEN CHANG-HONG ,YI XIN-JIAN ,XIONG BI-FENG ,
Abstract
VO2 thin films are used for uncooled microbolometer due to their high temperature coefficient of resistance.In this paper,on the basis of fabricating the uncooled bolometer based on VO2 sputtered thin films,the responsivity for the spectral range of 8-12μm region dependence on bias current and chopper frequency is studied.The result indicates that the responsivity is over 17kV/W and up to 10kV/W at a chopper frequency of 10 and 30Hz,respectively.The device having a detectivity D of exceeding 1.0×108cm (Hz)1/2/W and a thermal time constant of 0.011 seconds has been realized.
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy
Cited by
11 articles.
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