A RESEARCH OF THE CORRELATION BETWEEN SURFACE TOPOGRAPHY AND ANGULAR DISTRIBUTION OF SPUTTERED ATOMS
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Published:1991
Issue:2
Volume:40
Page:316
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ISSN:1000-3290
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Container-title:Acta Physica Sinica
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language:
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Short-container-title:Acta Phys. Sin.
Author:
WANG ZHEN-XIA ,PAN JI-SHENG ,TAO ZHEN-LAN ,ZHANG JI-PING ,ZHANG HUI-MING ,ZHANG WEI-PING ,LU ZHAO-LUN ,
Abstract
The angular distributions of sputtered atoms of cadmium have been measured with 27 keV Ar+ ion bombardment at normal incidence with different target temperature by using collector technique and RBS analysis. After the sputtering experiment the surface structures have been observed using scanning electron microscope. For all samples the angular distributions are over-cosine. However, the values of the deviation △ from the cosine distribution at the axis of polar angle of 0°is not all the same. The deviation △T at the target temperature of 150℃ △R is smaller than that at room teperature. ie. △TR. A simple model is proposed to explain the formation of pattern of angular distribution.
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy
Cited by
1 articles.
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1. Influence of surface topography on the sputtering yields of silver;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;1992-04