Author:
Lai Zhi ,Guo Liang ,Li Xiao-Zhen ,Dang Wen-Jia ,
Abstract
A novel method based on machine vision is proposed for measuring the effective d31 coefficient. Based on the best estimation of gray scale of interference pattern, the sensitivity of the twin-beam interferometry is significantly improved in comparison with previously reported system. Firstly, the interference pattern grabbed by machine vision system is extracted using the algorithm developed in this work. Secondly, using gray-scale pattern with 256 gray-levels the measurement accuracy of the interferometric optical path difference of the interferometer can reach 1/1024 of the wavelength of the laser theoretically. So the experimental results of a PZT pipe in the method are greatly accurate.
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy
Reference10 articles.
1. Jae Lee H, Zhang S, Meyer R J, Sherlock N P, Shrout T R 2012 Appl. Phys. Lett. 101 032902
2. Dekkers M, Boschker H, van Zalk M, Nguyen M, Nazeer H, Houwman E, Rijnders G 2013 J. Micromech. Microengin. 23 025008
3. Chen D R, Li G R, Yin Q R 1997 J. Inorganic Mater. 12 861 (in Chinese) [陈大任, 李国荣, 殷庆瑞 1997 无机材料学报 12 861]
4. Wu X M, Chen J B, Zhu R H, Cheng L J, Wang Q, Zhu Q S 2002 Infr. Laser Engin. 31 257 (in Chinese) [吴新民, 陈进榜, 朱日宏, 程丽君, 王青, 朱应时 2002 红外与激光工程 31 257]
5. Ji C, Zhang L Y, Dou S X, Wang P Y 2011 Acta Phys. Sin. 60 098703 (in Chinese) [季超, 张凌云, 窦硕星, 王鹏业 2011 物理学报 60 098703]
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