Ultralow-voltage in-plane-gate indium-tin-oxide thin-film transistors made of P-doped SiO2 dielectrics

Abstract

A new kind of indium-tin-oxide thin-film transistors made of P-doped SiO2 dielectrics in an in-plane-gate structure is fabricated at room temperature. Indium-tin-oxide (ITO) channel and ITO electrodes (gate, source, and drain) can be deposited simultaneously without precise photolithography and alignment process by using only one nickel shadow mask. So the thin film transistors (TFTs) have a lot of advantages, such as the simple device process、low cost etc. Such TFTs exhibit a good performance at an ultralow operation voltage of 1 V, a high field-effect mobility of 18.35 cm2/Vs , a small subthreshold swing of 82 mV/decade, and a large on-off ratio of 1.1×106, because of the huge electric-double-layer (EDL) capacitance (8 μF/cm2) between the interface of P-doped SiO2 dielectrics and ITO channel. So the TFTs are very promising for the application of low-power and portable electronic products and sensors in the future.