Author:
Zhang La-Bao ,Kang Lin ,Chen Jian ,Zhao Qing-Yuan ,Jia Tao ,Xu Wei-Wei ,Cao Chun-Hai ,Jin Biao-Bing ,Wu Pei-Heng ,
Abstract
In this paper,the fabrication details and optimization of micro-fabrication process are presented for developing superconducting nanowire single-photon detectors (SNSPD). Besides,the device failure analysis is also introduced. With those methods,we successfully fabricated high-quality SNSPDs whose maximum system efficiencies were up to 30% for 660 nm wavelength and 4.2% for 1550 nm wavelength according to the single-photon detection experiment. At the dark count rate of 10 c/s,the detection efficiencies were 20% (660 nm) and 3% (1550 nm) with the SNSPD fabricated with above mentioned methods.
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy
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