Effect of external magnetic field on ion energy density of collisional radio-frequency sheath
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Published:2009
Issue:9
Volume:58
Page:6392
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ISSN:1000-3290
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Container-title:Acta Physica Sinica
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language:
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Short-container-title:Acta Phys. Sin.
Author:
Zou Xiu ,Zou Bin-Yan ,Liu Hui-Ping ,
Abstract
A two-fluid model is proposed to describe the collisional radio-frequency plasma sheath in a magnetic field, and the ion energy distribution incident on the radio-frequency sheath biased electrode is numerically investigated. The simulation results reveal that the external magnetic field dominates the ion flux and energy distribution of the sheath. The ion energy can be transferred between the perpendicular direction and parallel direction under the action of magnetic field.
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy