Study on influence of ring hole array metamaterial on performance of pyroelectric terahertz detectors

Abstract

In order to improve the detection performance of 0.1–1THz terahertz wave, a new lithium tantalate pyroelectric terahertz detector based on ring hole array metamaterial is proposed. The quantitative influences of the characteristic parameters such as inner diameter, outer diameter, period and thickness on the transmission bandwidth and transmittance of ring hole array metamaterials are analyzed by simulation. The mechanisms of the influences of different combinations of ring hole array metamaterials and pyroelectric detectors on the detection bandwidth and detection rate of terahertz waves are clarified. The lithium tantalate pyroelectric terahertz detectors of the ring hole array metamaterial ware are fabricated by the MEMS technology. The transmission of the ring hole array metamaterial and the noise equivalent power of the metamaterial detector at different frequencies are tested. The results show that the transmittance of the fabricated ring hole array metamaterial is greater than 40% at 0.25–0.65 THz, and bandpass filtering is realized. When the ring hole array metamaterial and the pyroelectric detector maintain a sufficient distance, the noise equivalent power of the detector at 0.315 THz is 11.29 μW/Hz^0.5, which is 6.3% of the 0.1 THz noise equivalent power (outside the bandpass band), so the bandpass detection is achieved. When the ring hole array metamaterial is attached to the detector, the noise equivalent power of the metamaterial detector at 0.315 THz is 4.64 μW/Hz^0.5, which is 29.4% that of the detector without the ring hole array metamaterial, so the narrowband detection is achieved. The above conclusions show that the pyroelectric terahertz detector based on the ring hole array metamaterial can realize the bandpass and narrowband detection of specific frequency band in applications such as biological imaging and macromolecular detection.