Author:
Li Qiang ,Wang Kai-Ge ,Dang Wei-Jun ,Hui Dan ,Ren Zhao-Yu ,Bai Jin-Tao ,
Abstract
On the basis of the first oxide prepared anodized aluminum oxide template (AAO), the second, third and fourth oxidation preparation are implemented in turn. Then, the surface morphology and current curve changes of the AAO template with multiple oxidation preparation were compared and analyzed systemically. The apertures of nanopore made by the second, third and forth oxidation increase in order, the intervals between neighboring apertures reduce. However, the scale of ordered distribution of nanopores on the whole template surface does not change significantly. Then, carefully controlling the working conditions for the membrane-removed of the one-step oxidation AAO, the nanoporous with regular apertures and highly ordered was obtained after getting rid of the top oxidation layer about 10 minutes. Finally, based on those prepared AAO templates, integrated with the thermal nanoimprint lithography, we achieved the PMMA nano-pillar arrays with controllable lengths and diameters.
Publisher
Acta Physica Sinica, Chinese Physical Society and Institute of Physics, Chinese Academy of Sciences
Subject
General Physics and Astronomy
Reference18 articles.
1. Wang Y H, Mou J M, Cai W L, Shi G 2001 Acta Phys. Chim. Sin. 17 116
2. Liu H W, Guo H M, Wang Y L, Shen C M 2004 Acta Phys. Sin. 53 656 (in Chinese) [刘虹雯、 郭海明、 王业亮、 申承民 2004 物理学报 53 656]
3. Liu H W, Yang H Q, Gou H M, Wang Y L, Lin X, Pang S J, Gao H J 2002 Naotechnology 13 729
4. Bai A Q, Hu D, Ding W C, Sun S J, Hu W X, Xue C L, Fan Z C, Cheng B W, Yu Y D, Wang Q M 2009 Acta Phys. Sin. 58 4997 (in Chinese) [白安琪、 胡 迪、 丁武昌、 苏少坚、 胡炜玄、 薛春来、 樊中朝、 成步安、 俞育德、 王启明 2009 物理学报 58 4997]
5. Fan Z Y, Razavil H, Do J W, Moriwaki A, Ergen O, Chuch Y L, Paul W L, Joel W A, Ali J 2009 Nature materials 10 1038
Cited by
7 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献