1. HSG-IMIT Institute of Micromachining and Information Technology Wilhelm-Schickard-Straße 10, D78052, Villingen-Schwenningen, Germany; Chair of Microelectronics, Department of Microsystems Engineering IMTEK), University of Freiburg
2. HSG-IMIT Institute of Micromachining and Information Technology Wilhelm-Schickard-Straße 10, D78052, Villingen-Schwenningen, Germany
3. HSG-IMIT Institute of Micromachining and Information Technology Wilhelm-Schickard-Straße 10, D78052, Villingen-Schwenningen, Germany; Chair of Microelectronics, Department of Microsystems Engineering IMTEK), University of Freiburg Georges-Köhler-Allee 101, D79110, Freiburg, Germany