1. G. Ozaydin-Ince, A.M. Coclite, K.K. Gleason, Rep. Prog. Phys. 75, 016501 (2012)
2. A. Ohl, W. Besch, H. Steffen, R. Foest, M. Arens, K. Wandel, Plasma Process. Polym. 6, 425 (2009)
3. R. Dittmann, in Electronic Oxides – Correlation Phenomena, Exotic Phases and Novel Functionalities, edited by S. Blügel, Th. Brückel, R. Waser, C.M. Schneider, Lecture Notes of the 41th Spring School 2010 (Forschungszentrum Jülich, Jülich, 2010), Vol. 13
4. J.A. Venables, Introduction to surface and thin film Processes (Cambridge University Press, 2000)
5. P. Ebert, K. Szot, in Nanoelectronics and Information Technology, Advanced Electronic Materials and Novel Devices, edited by R. Waser, 3rd edn. (Wiley-VCH, Weinheim, 2012), pp. 255–281