Investigation over effect of different carbon content on various properties of titanium carbon nitride (TiCN) coating grown on Si (100) substrate by chemical vapor deposition (CVD) process-Reference-Cited by-同舟云学术

Investigation over effect of different carbon content on various properties of titanium carbon nitride (TiCN) coating grown on Si (100) substrate by chemical vapor deposition (CVD) process

Published:2022-03 Issue:3 Volume:137 Page:
ISSN:2190-5444
Container-title:The European Physical Journal Plus
language:en
Short-container-title:Eur. Phys. J. Plus

Author:

Guha Spandan^ORCID,Das Soham

Publisher

Springer Science and Business Media LLC

Subject

General Physics and Astronomy

Link

https://link.springer.com/content/pdf/10.1140/epjp/s13360-022-02587-w.pdf

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