Freestanding epitaxial SrTiO <sub>3</sub> nanomembranes via remote epitaxy using hybrid molecular beam epitaxy-Reference-Cited by-同舟云学术

Freestanding epitaxial SrTiO ₃ nanomembranes via remote epitaxy using hybrid molecular beam epitaxy

Published:2022-12-23 Issue:51 Volume:8 Page:
ISSN:2375-2548
Container-title:Science Advances
language:en
Short-container-title:Sci. Adv.

Author:

Yoon Hyojin¹^ORCID,Truttmann Tristan K.¹^ORCID,Liu Fengdeng¹,Matthews Bethany E.²^ORCID,Choo Sooho¹,Su Qun³,Saraswat Vivek⁴,Manzo Sebastian⁴,Arnold Michael S.⁴^ORCID,Bowden Mark E.⁵^ORCID,Kawasaki Jason K.⁴^ORCID,Koester Steven J.³^ORCID,Spurgeon Steven R.²⁶^ORCID,Chambers Scott A.⁷^ORCID,Jalan Bharat¹^ORCID

Affiliation:

1. Department of Chemical Engineering and Materials Science, University of Minnesota, Twin Cities, Minneapolis, MN 55455, USA.

2. Energy and Environment Directorate, Pacific Northwest National Laboratory, Richland,, WA 99352, USA.

3. Department of Electrical and Computer Engineering, University of Minnesota, Twin Cities, Minneapolis, MN 55455, USA.

4. Department of Materials Science and Engineering, University of Wisconsin–Madison, Madison, WI 53706, USA.

5. Environmental Molecular Sciences Laboratory, Pacific Northwest National Laboratory, Richland, WA 99352, USA.

6. Department of Physics, University of Washington, Seattle, WA 98195, USA.

7. Physical and Computational Sciences Directorate, Pacific Northwest National Laboratory, Richland, WA 99352, USA.

Abstract

The epitaxial growth of functional oxides using a substrate with a graphene layer is a highly desirable method for improving structural quality and obtaining freestanding epitaxial nanomembranes for scientific study, applications, and economical reuse of substrates. However, the aggressive oxidizing conditions typically used in growing epitaxial oxides can damage graphene. Here, we demonstrate the successful use of hybrid molecular beam epitaxy for SrTiO 3 growth that does not require an independent oxygen source, thus avoiding graphene damage. This approach produces epitaxial films with self-regulating cation stoichiometry. Furthermore, the film (46-nm-thick SrTiO 3 ) can be exfoliated and transferred to foreign substrates. These results open the door to future studies of previously unattainable freestanding oxide nanomembranes grown in an adsorption-controlled manner by hybrid molecular beam epitaxy. This approach has potentially important implications for the commercial application of perovskite oxides in flexible electronics and as a dielectric in van der Waals thin-film electronics.

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

Reference35 articles.

1. Hysteretic Magnetoresistance in a Non-Magnetic SrSnO3 Film via Thermal Coupling to Dynamic Substrate Behavior

2. Freestanding Perovskite Oxide Films: Synthesis, Challenges, and Properties

3. The Double-Surface Transistor

4. W. E. Bradley. (U.S. Patent 2 846 346 1954).

5. A. G. Milnes D. L. Feucht. (U.S. Patent 4 159 354 1976).

Cited by 26 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Band alignment and charge transfer mechanisms in the prediction of advanced gate dielectrics for carbon nanotube field-effect transistors;Applied Surface Science;2024-10

2. Atomic Spalling of a van der Waals Nanomembrane;Accounts of Chemical Research;2024-09-12

3. Cold Seeded Epitaxy and Flexomagnetism in GdAuGe Membranes Exfoliated From Graphene/Ge(111);Nano Letters;2024-08-12

4. Mixed-Dimensional Integration of 3D-on-2D Heterostructures for Advanced Electronics;Nano Letters;2024-07-22

5. Unfolding the Challenges To Prepare Single Crystalline Complex Oxide Membranes by Solution Processing;ACS Applied Materials & Interfaces;2024-07-05