1. Laboratory of Process Engineering, NeptunLab, Department of Microsystems Engineering (IMTEK), Albert Ludwig University of Freiburg, 79110 Freiburg, Germany.
2. Freiburg Materials Research Center (FMF), Albert Ludwig University of Freiburg, 79104 Freiburg, Germany.
3. Injex AG, 8952 Schlieren, Switzerland.
4. Institute of Physics, Albert Ludwig University of Freiburg, 79104 Freiburg, Germany.
5. Gisela and Erwin Sick Chair of Micro-optics, Department of Microsystems Engineering (IMTEK), Albert Ludwig University of Freiburg, 79110 Freiburg, Germany.
6. Glassomer GmbH, 79110 Freiburg, Germany.
7. FIT Freiburg Center of Interactive Materials and Bioinspired Technologies, Albert Ludwig University of Freiburg, 79110 Freiburg, Germany.