Nanoscale temperature mapping in operating microelectronic devices

Author:

Mecklenburg Matthew1,Hubbard William A.23,White E. R.23,Dhall Rohan4,Cronin Stephen B.4,Aloni Shaul5,Regan B. C.23

Affiliation:

1. Center for Electron Microscopy and Microanalysis, University of Southern California, Los Angeles, CA 90089, USA.

2. Department of Physics and Astronomy, University of California, Los Angeles, CA 90095, USA.

3. California NanoSystems Institute, University of California, Los Angeles, CA 90095, USA.

4. Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, USA.

5. Molecular Foundry, Lawrence Berkeley National Laboratory, Berkeley, CA 94720, USA.

Abstract

Plasmons can map temperature on the nanoscale Determining temperature on small length scales can be challenging: Direct probes can alter sample temperature, and radiation probes are limited by the wavelength of the light used. Mecklenberg et al. show how the bulk plasmon resonance of aluminum can be used to map the temperature on the nanoscale with transmission electron microscopy (see the Perspective by Colliex). Many other metals and semiconductors also have plasmon resonances that could also be used for temperature imaging. Science , this issue p. 629 ; see also p. 611

Funder

National Science Foundation

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

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