Microfabrication Inside Capillaries Using Multiphase Laminar Flow Patterning

Author:

Kenis Paul J. A.1,Ismagilov Rustem F.1,Whitesides George M.1

Affiliation:

1. Department of Chemistry and Chemical Biology, Harvard University, 12 Oxford Street, Cambridge, MA 02138, USA.

Abstract

The reaction of species in solutions flowing laminarly (without turbulent mixing) inside capillaries was used as the basis for a broadly applicable method of microfabrication. In this method, patterning occurs as a result of transport of reactive species to interfaces within the capillary by laminar flow. A wide range of chemistries can be used to generate structures with feature sizes of less than 5 micrometers and with spatial localization to within 5 micrometers. The method is applicable to the patterning of metals, organic polymers, inorganic crystals, and ceramics on the inner walls of preformed capillaries, using both additive and subtractive processes.

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

Reference22 articles.

1. M. Madou Fundamentals of Microfabrication (CRC Press New York 1997).

2. Reynolds O., Philos. Trans. 174, 935 (1883);

3. ; ibid. 186 123 (1895).

4. At a flow rate of 0.50 m/s Re = 50 for aqueous phases in a 100-μm-wide channel. The broadening of a liquid-liquid interface by diffusion is given by 〈 x diff 2 〉 = 2 Dt diff with diffusion coefficient D (cm 2 /s) and x diff (cm) and t diff (s) the distance and time of diffusion respectively [P. W. Atkins Physical Chemistry (Freeman New York 1994)]. The broadening of the features fabricated by FLO cannot be calculated with that equation alone because the profile of pressure-driven flow is parabolic [

5. Brody J. P., Yager P., Goldstein R. E., Austin R. H., Biophys. J. 71, 3430 (1996);

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