Phase patterning for ohmic homojunction contact in MoTe 2

Author:

Cho Suyeon1,Kim Sera12,Kim Jung Ho12,Zhao Jiong1,Seok Jinbong12,Keum Dong Hoon12,Baik Jaeyoon3,Choe Duk-Hyun4,Chang K. J.4,Suenaga Kazu5,Kim Sung Wng2,Lee Young Hee12,Yang Heejun2

Affiliation:

1. IBS Center for Integrated Nanostructure Physics (CINAP), Institute for Basic Science, Sungkyunkwan University, Suwon 440-746, Korea.

2. Department of Energy Science, Sungkyunkwan University, Suwon 440-746, Korea.

3. Pohang Accelerator Laboratory, Pohang University of Science and Technology, Pohang 790-784, Korea.

4. Department of Physics, Korea Advanced Institute of Science and Technology, Daejeon 305-701, Korea.

5. National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba 305-8565, Japan.

Abstract

Making better contacts A key issue in fabricating transistors is making a good electrical contact to the semiconductor gate material. For two-dimensional materials, one route is through a phase transition that converts a hexagonally packed semiconductor phase into a distorted octahedrally packed metallic phase. Cho et al. show that laser heating of molybdenum telluride (MoTe 2 ) achieves this conversion through the creation of Te vacancies. The phase transition improves charge carrier mobility while maintaining the low resistance necessary for improved transistor function. Science , this issue p. 625

Funder

NRF

National Research Foundation of Korea (NRF)

Institute for Basic Science

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

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