Formation of Nanometer-Scale Grooves in Silicon with a Scanning Tunneling Microscope
Author:
Affiliation:
1. Aono Atomcraft Project, ERATO, JRDC, 5-9-9 Tohkohdai, Tsukuba, Ibaraki 300-26, Japan
2. Department of Chemistry and Biochemistry, University of California, Los Angeles, CA 90024-1569
Publisher
American Association for the Advancement of Science (AAAS)
Subject
Multidisciplinary
Reference23 articles.
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2. BECKER, R.S., ATOMIC SCALE CONVERSION OF CLEAN SI(111)-H-1X1 TO SI(111)-2X1 BY ELECTRON-STIMULATED DESORPTION, PHYSICAL REVIEW LETTERS 65: 1917 (1990).
3. BOLAND, J.J., THE DRIVING FORCE BEHIND THE CHEMISTRY OF HYDROGEN ON THE SI(111)-7X7 SURFACE, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 9: 764 (1991).
4. BROMMER, K.D., ABINITIO THEORY OF THE SI(111)-(7X7) SURFACE RECONSTRUCTION - A CHALLENGE FOR MASSIVELY PARALLEL COMPUTATION, PHYSICAL REVIEW LETTERS 68: 1355 (1992).
5. DOBISZ, E.A., SCANNING TUNNELING MICROSCOPE LITHOGRAPHY - A SOLUTION TO ELECTRON-SCATTERING, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 9: 3024 (1991).
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