Ionic Vacuum Pumps

Author:

Hall Lewis D.1

Affiliation:

1. Varian Associates, Palo Alto, Calif.

Publisher

American Association for the Advancement of Science (AAAS)

Subject

Multidisciplinary

Cited by 12 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. History of Vacuum Electronics and Vacuum Electron Sources and Future Development Trends;Modern Developments in Vacuum Electron Sources;2020

2. Review Article: Tracing the recorded history of thin-film sputter deposition: From the 1800s to 2017;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2017-09

3. Historical development and future trends of vacuum electronics;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2012-11

4. Overview of the development of Ion Pumps;Vakuum in Forschung und Praxis;2005-02

5. Changes in the chemical reactivity of metals exposed to an inert gas glow discharge;Vacuum;1983-05

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