1. Department of Mechanical Engineering, University of California, Berkeley, CA 94720, USA.
2. Department of Microsystems Engineering, Albert Ludwig University of Freiburg, 79104 Freiburg, Germany.
3. Lawrence Livermore National Laboratory, Livermore, CA 94550, USA.
4. Glassomer GmbH, Georges-Köhler-Allee 103, 79110 Freiburg, Germany.
5. Freiburg Materials Research Center (FMF), Albert Ludwig University of Freiburg, 79104 Freiburg, Germany.
6. Freiburg Center of Interactive Materials and Bioinspired Technologies (FIT), Albert Ludwig University of Freiburg, 79110 Freiburg, Germany.