Monolithic optical microlithography of high-density elastic circuits
Author:
Affiliation:
1. Department of Chemical Engineering, Stanford University, Stanford, CA 94305, USA.
2. Department of Bioengineering, Stanford University, Stanford, CA 94305, USA.
3. Department of Chemistry, Stanford University, Stanford, CA 94305, USA.
Abstract
Funder
Air Force Office of Scientific Research
Stanford Nano Shared Facilities
Publisher
American Association for the Advancement of Science (AAAS)
Subject
Multidisciplinary
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