1. Interdisciplinary Center for Quantum Information, State Key Laboratory of Modern Optical Instrumentation, and Zhejiang Province Key Laboratory of Quantum Technology and Device, Department of Physics, Zhejiang University, Hangzhou 310027, China.
2. School of Integrated Circuit Science and Engineering, Beihang University, Beijing, 100191, China.
3. Center of Electron Microscope, State Key Laboratory of Silicon Materials, School of Materials Science and Engineering, Zhejiang University, Hangzhou, 310027, China.
4. Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences, Beijing 100190, China.
5. Songshan Lake Materials Laboratory, Dongguan, Guangdong 523808, China.
6. Kavli Institute for Theoretical Sciences and CAS Center for Excellence in Topological Quantum Computation, University of Chinese Academy of Sciences, Beijing 100190, China.
7. School of Physical Sciences, University of Chinese Academy of Sciences, Beijing 100049, China
8. Collaborative Innovation Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China.