Mesh-reinforced Vaseline-assisted graphene transfer compatible with industrial automation operations-Reference-Cited by-同舟云学术

Mesh-reinforced Vaseline-assisted graphene transfer compatible with industrial automation operations

Published:2024-07-23 Issue: Volume: Page:
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Author:

Li Xuesong¹^ORCID,Guo Xiaomeng¹,Qing Fangzhu²,Liu Wei¹,Liu Yaxin³,Liang Yiji⁴,Li Runlai⁵^ORCID,li Pingjian¹,Tu Xiaoming¹,Liu Chunlin¹^ORCID,Li Zhancheng⁶,Wang Huaipeng⁷,Ran Yutong⁸,Shi Haofei⁹^ORCID,Xie Dan⁷^ORCID,Zhu Hongwei⁷^ORCID,Niu Xiaobin¹⁰,Zhao Zejia¹¹,Shen Changqing¹

Affiliation:

1. University of Electronic Science and technology of China

2. School of Electronic Science and Engineering, University of Electronic Science and Technology of China

3. Shenzhen Institute for Advanced Study, University of Electronic Science and technology of China

4. Shenzhen University

5. College of Polymer Science & Engineering, State Key Laboratory of Polymer Materials Engineering; Sichuan University, Chengdu 610065, P. R. China

6. Chongqing Key Laboratory of Multi-scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences, Chongqing

7. Tsinghua University

8. School of Materials Science and Engineering, Tsinghua University

9. Chongqing Key Laboratory of Multi-Scale Manufacturing Technology, Chongqing Institute of Green and Intelligent Technology, Chinese Academy of Sciences

10. UESTC

11. Institute of Semiconductor Manufacturing Research, College of Mechatronics and Control Engineering, Shenzhen University

Abstract

The growth of graphene on Cu via chemical vapor deposition has been well established for producing large-area high-quality graphene films, with graphene transfer to other substrate as an essential step for its applications. Various transfer techniques have been studied, but real industrial automation operations have seldom been developed. We report a mesh-reinforced Vaseline-assisted transfer method, which utilizes a mesh embedded Vaseline structure, similar to reinforced concrete, as a carrier film for graphene transfer. Vaseline acts as an adhesive layer that preserves graphene’s integrity and can be easily removed, while the mesh reinforcement ensures the structure self-support and therefore easy processing, compatible with industrial automation operations. Successful graphene transfers onto SiO₂/Si wafers and curved surfaces with good integrity and cleanliness are demonstrated and an automated graphene transfer production line is also presented, highlighting the potential for mass production and applicability to other two-dimensional materials and thin films as well.

Publisher

Springer Science and Business Media LLC

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