One-pot microfluidic fabrication of micro ceramic particles

Abstract

Abstract In the quest for miniaturization across technical disciplines, microscale ceramic blocks emerge as pivotal components, with performance critically dependent on precise scales and intricate shapes. Sharp-edged ceramic microparticles, applied from micromachining to microelectronics, require innovative fabrication techniques for high-throughput production while maintaining structural complexity and mechanical integrity. This research unveils a revolutionary "one-pot microfluidic fabrication" technique, blending two innovative device fabrication strategies, "groove & tongue" and sliding assembling. This approach yields a remarkable variety of microparticles, each intricately shaped and precisely crafted, significantly surpassing traditional methods in both production speed and quality. Optimally designed sintering profiles enhance microparticles’ shape retention and structural strength. Extensive compression and scratch tests validate the superiority of microparticles, suggesting their practicability for diverse applications, such as precise micromachining, sophisticated microrobotics and delicate microsurgical tools. This advancement marks a paradigm shift in microscale manufacturing, offering a scalable solution to meet the demanding specifications of miniaturized technology components.