Quasi-seamless stitching for large-area micropatterned surfaces enabled by Fourier spectral analysis of moiré patterns

Abstract

Abstract The main challenge in preparing a flexible mold stamp using roll-to-roll nanoimprint lithography is to simultaneously increase the imprintable area with a minimized perceptible seam. However, the current methods for stitching multiple small molds to fabricate large-area molds and functional surfaces typically rely on the alignment mark, which inevitably produces a clear alignment mark and stitched seam. In this study, a self-pattern alignment (SPA) method inspired by moiré engineering is proposed to fabricate scalable functional surfaces and flexible imprint molds with quasi-seamless and alignment mark-free patterning, which is based on the Fourier spectral analysis of moiré patterns formed by superposed identical patterns. By harnessing the rotational invariance property in the Fourier transform, SPA was confirmed to be a simple and efficient method for extracting the rotational and translational offsets in overlapped periodic or nonperiodic patterns with a minimized stitched region, thereby allowing for the large-area and quasi-seamless fabrication of imprinting molds and functional surfaces, such as liquid-repellent film and micro-optical sheets, that surpass the conventional alignment and stitching limits and potentially expand their application in producing large-area metasurfaces.