A composite strategy for high-quality and high-efficiency milling of alumina ceramic via femtosecond laser burst-mode

Abstract

Abstract Industrial alumina ceramics require high surface accuracy when assembled to critical components of devices, for which high-quality milling has become an integral process. To mill the alumina ceramics for high-quality and high-efficiency, this paper used a composite strategy via the femtosecond laser burst-mode. Milling the same structure, the roughness of the bottom surface of the grooves was reduced by up to 10.69% compared to the optimal processing results in a single process, and processing efficiency was maximized with a 49.91% increase. Different laser parameters such as energy fluence, spot overlap ratio, scanning spacing were investigated for the processing quality and efficiency of alumina ceramics in the single-pulse mode. The effect of the burst-mode on the optimization of the milling results was analyzed and discussed.To mill the alumina ceramics with high-efficiency, the composite processing strategy was used. Meantime, the paper proposed a high-quality and high-efficiency composite milling strategy via the femtosecond laser burst-mode, which provided a reference for processing other materials.