Modeling the Performance of a Single Rotor Row in a Turbomolecular Pump Using the TPMC Method: Effects of Operational and Geometric Variables

Abstract

Turbo-molecular pumps are widely used in industries and scientific studies in areas such as semiconductors and sedimentation. In; such pumps, the influence of the geometric characteristics and operating conditions on performance is of interest to researchers. A single-row rotor of a turbo-molecular pump was simulated, and the test particle Monte Carlo method was used to investigate the effects of blade spacing, angle, number, and length; as well as operating conditions on performance. The maximum compression ratio and pumping speed were calculated. The pump’s performance was studied for 12, 24, 36, and 48 blades in a single-row rotor at angles of 15, 20, and 30 degrees with a clearance of 0.015. We were increasing the gap from 0.015 to 0.025 and 0.035 examined across rotors with 12 to 48 blades, a blade speed ratio of 3.5, and a blade angle of 15 degrees. To validate the results, the numerical values obtained for 36 blades, 30-degree blade angle, and 0.015 clearance were compared to available experimental results, yielding good agreement. The results of this simulation are intended to cover cases of interest for design calculations.