Laser reflection spot as a pattern in a diamond coating: A microscopic study

Abstract

Diamond coatings were deposited by the synchronous and coupled action of a hot filament CVD method and a pulsed CO2 laser in spectro-absorbing and spectro-non-absorbing diamond precursor atmospheres. The obtained coatings were structured/patterned, i.e., they were comprised of uncovered, bare locations. An extra effect observed only in the spectro-active diamond precursor atmosphere was the creation of another laser spot in the coating - a reflection spot. In order to establish the practical usability of the latter one, extensive microscopic investigations were performed with consideration of the morphology changes in the spot of the direct laser beam. Normal incidence SEM images of this spot showed a smooth surface, without any pulse radiation damage. AFM imaging revealed the actual surface condition and gave precise data on the surface characteristics.