Affiliation:
1. Faculty of Technical Sciences, Novi Sad
2. Vienna University of Technology, Institute for Sensor and Actuator Systems, Vienna, Austria
Abstract
In this work, two variations of the displacement sensor, based on the
heterogeneous integration process of traditional fabrication technologies PCB
(Printed Circuit Board) and LTCC (Low Temperature Co-fired Technology) with a
flexible polyimide foil are presented. The proposed sensor uses the coil as
an essential part, spacer and a polyimide foil as a flexible membrane with a
piece of ferrite attached to it. With the displacement of the polyimide foil,
the ferrite gets closer to the coil causing an increase in its inductance and
a decrease of the resonant frequency of the system (coil, ferrite and
antenna). Simulation results showed that sensors with equal outer dimensions
but different internal structures exhibit different performances. Two
prototypes of the sensor with different ferrite dimensions are designed,
fabricated and characterized. Finally, their performances are compared.
Funder
Ministry of Education, Science and Technological Development of the Republic of Serbia
Publisher
National Library of Serbia
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献