Sensitive Site-Specific Dopant Mapping in Scanning Electron Microscopy on Specimens Prepared by Low Energy Ar+Ion Milling
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
http://stacks.iop.org/1882-0786/6/i=12/a=126601/pdf
Reference20 articles.
1. Deactivation and diffusion of boron in ion-implanted silicon studied by secondary electron imaging
2. Secondary electron imaging as a two-dimensional dopant profiling technique: Review and update
3. Energy-Filtered Secondary-Electron Imaging for Nanoscale Dopant Mapping by Applying a Reverse Bias Voltage
4. Site-specific dopant profiling in a scanning electron microscope using focused ion beam prepared specimens
5. Site-selective dopant profiling of p-n junction specimens in the dual-beam FIB/SEM system
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Towards quantification of doping in gallium arsenide nanostructures by low‐energy scanning electron microscopy and conductive atomic force microscopy;Journal of Microscopy;2024-01-18
2. Optimized dopant imaging for GaN by a scanning electron microscopy;Journal of Microscopy;2023-05-31
3. Unravelling new principles of site-selective doping contrast in the dual-beam focused ion beam/scanning electron microscope;Ultramicroscopy;2020-06
4. Imaging photoinduced surface potentials on hybrid perovskites by real-time Scanning Electron Microscopy;Micron;2019-06
5. Direct Imaging of p–n Junction in Core–Shell GaN Wires;Nano Letters;2014-05-29
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3