Reverse-tone ultraviolet nanoimprint lithography with fluorescent UV-curable resins
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/54/i=6S1/a=06FM02/pdf
Reference29 articles.
1. Mold-assisted nanolithography: A process for reliable pattern replication
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5. 3D materials made of gold using Nanoimprint Lithography
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1. Micro-print and nano-imprint methods combining laser-drilled screen printing and ultraviolet nanoimprint lithography: a review;Japanese Journal of Applied Physics;2022-05-20
2. Single pulse development of chromium-deposited imprint micro/nano patterns of photo-cured crosslinked resin using a femtosecond pulsed laser;Japanese Journal of Applied Physics;2021-03-25
3. Organic–Inorganic Hybrid Replica Molds with High Mechanical Strength for Step-and-Repeat Ultraviolet Nanoimprinting;Bulletin of the Chemical Society of Japan;2020-07-15
4. Photocurable chemically-amplified positive-tone ultraviolet resist for multi lithography process;Applied Physics Express;2019-10-30
5. Ultra-violet nanoimprint lithography-compatible positive-tone electron beam resist for 3D hybrid nanostructures;Microelectronic Engineering;2019-05
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