Dependence of composition of stable molecules in N2–H2plasmas on nitrogen gas flow rate ratio measured using a quartz sensor
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/53/i=11S/a=11RC03/pdf
Reference43 articles.
1. In situ measurement of gas composition changes in radio frequency plasmas using a quartz sensor
2. Spatial distributions of gas composition in rf glow discharge plasmas measured using a quartz sensor
3. Measurement for dissociation ratio of source gases in plasmas using a quartz sensor
4. Secondary Ionization Coefficient of MgO and Accumulated Charge
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