Excimer laser annealing for low-voltage power MOSFET
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/55/i=8/a=086503/pdf
Reference19 articles.
1. Industrialisation of Resurf Stepped Oxide Technology for Power Transistors
2. COOLMOS/sup TM/-a new milestone in high voltage power MOS
3. Fundamentals of Power Semiconductor Devices
4. Flash lamp annealing technology for ultra-shallow junction formation
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