Simulation of ion energy and angular distribution functions using Monte Carlo method coupled with multidimensional radio frequency sheath model developed utilizing COMSOL Multiphysics-Reference-Cited by-同舟云学术

Simulation of ion energy and angular distribution functions using Monte Carlo method coupled with multidimensional radio frequency sheath model developed utilizing COMSOL Multiphysics

Published:2014-07-25 Issue:8 Volume:53 Page:080304
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Denpoh Kazuki

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/53/i=8/a=080304/pdf

Reference23 articles.

1. Ion energy distributions in rf sheaths; review, analysis and simulation

2. Ion energy and angular distribution at the radio frequency biased electrode in an inductively coupled plasma apparatus

3. Sheath Model for Dual-Frequency Capacitively Coupled Plasmas

4. Ion energy distribution control in single and dual frequency capacitive plasma sources

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