High-purity cobalt thin films with perpendicular magnetic anisotropy prepared by chemical vapor deposition
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,General Engineering
Link
http://stacks.iop.org/1882-0786/8/i=11/a=113005/pdf
Reference14 articles.
1. Chemical Vapor Deposition of Cobalt Nitride and its Application as an Adhesion-Enhancing Layer for Advanced Copper Interconnects
2. Perpendicular magnetic anisotropy in iron films produced by laser chemical vapour deposition of Fe(CO)/sub 5/
3. Study of magnetic properties of thin cobalt films deposited by chemical vapour deposition
4. Domain structures of MOCVD cobalt thin films
5. Comparison of Co Films Deposited by Remote Plasma Atomic Layer Deposition Method with Cyclopentadienylcobalt Dicarbonyl [CpCo(CO)2] and Dicobalt Octacarbonyl [Co2(CO)8]
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