Over 1.5 µm Deep Dry Etching of Al-Rich AlGaAs for Photonic Crystal Fabrication
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Reference31 articles.
1. Photonic crystal nanocavity laser with a single quantum dot gain
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3. Deeply etched two-dimensional photonic crystals fabricated on GaAs/AlGaAs slab waveguides by using chemically assisted ion beam etching
4. Inductively coupled plasma etching of GaAs suspended photonic crystal cavities
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1. Oblique Deposition of Ti/Pt/Au Electrode on Photonic Crystal for Vertical Current Injection;Applied Sciences;2020-11-25
2. AlGaAs film growth using thermionic vacuum arc (TVA) and determination of its physical properties;The European Physical Journal Plus;2015-06
3. Dry etching of Al-rich AlGaAs with silicon nitride masks for photonic crystal fabrication;Japanese Journal of Applied Physics;2015-03-06
4. Improved luminescence from tensile-strained compound semiconductor quantum wells with dielectric-rod photonic crystals;Applied Physics Express;2014-10-28
5. Analysis of Cavity–Waveguide Coupling in Two-Dimensional Photonic Crystals;IEEE Photonics Journal;2014-06
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