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Heat-Resistant Co–W Catalytic Metals for Multilayer Graphene Chemical Vapor Deposition

  • Published:2013-04-01 Issue:4S Volume:52 Page:04CB04
  • ISSN:0021-4922
  • Container-title:Japanese Journal of Applied Physics
  • language:
  • Short-container-title:Jpn. J. Appl. Phys.

Author:

Ueno Kazuyoshi,Karasawa Yusuke,Kuwahara Satoru,Baba Shotaro,Hanai Hitoshi,Yamazaki Yuichi,Sakuma Naoshi,Kajita Akihiro,Sakai Tadashi

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Graphene Cap Formation on Nickel Thin Films by Thermal CVD at Low Temperature;2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM)(IITC/MAM);2023-05

2. Low-temperature synthesis of multilayer graphene directly on SiO2by current-enhanced solid-phase deposition using Ni catalyst;Japanese Journal of Applied Physics;2020-05-21

3. Effect of current stress during thermal CVD of multilayer graphene on cobalt catalytic layer;Japanese Journal of Applied Physics;2016-03-23

4. Graphene supported heterogeneous catalysts: An overview;International Journal of Hydrogen Energy;2015-01

5. Bromine doping of multilayer graphene for low-resistance interconnects;Japanese Journal of Applied Physics;2014-04-22
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