Syntheses of A15 Nb3(Si, Ge) Films by Alternated Sputtering Technique
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Published:1987-01-01
Issue:S3-2
Volume:26
Page:1453
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ISSN:0021-4922
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Container-title:Japanese Journal of Applied Physics
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language:
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Short-container-title:Jpn. J. Appl. Phys.
Author:
Nakamura Toshiyuki,Yamamoto Hiroshi,Tanaka Masaichi
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering