Author:
Choi Jun-Hyuk,Lee Soon-Won,Lee Ji-Hye,Choi Dae-Geun,Jeong Jun-Ho,Lee Eung-Sug
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Cited by
1 articles.
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1. Development of a force-decoupled parallel alignment device for nanoimprint applications;Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture;2013-09-02