Electrowetting Lens Employing Hemispherical Cavity Formed by Hydrofluoric Acid, Nitric Acid, and Acetic Acid Etching of Silicon-Reference-Cited by-同舟云学术

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Electrowetting Lens Employing Hemispherical Cavity Formed by Hydrofluoric Acid, Nitric Acid, and Acetic Acid Etching of Silicon

Published:2012-06-01 Issue:6S Volume:51 Page:06FL05
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Lee June Kyoo,Choi Ju Chan,Jang Won Ick,Kim Hak-Rin,Kong Seong Ho

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Reference30 articles.

1. Electrowetting-Based Variable-Focus Lens for Miniature Systems

2. Variable focal lens controlled by an external voltage: An application of electrowetting

3. Dependence of dielectric layer and electrolyte on the driving performance of electrowetting‐based liquid lens

4. High-speed liquid lens with 2 ms response and 80.3 nm root-mean-square wavefront error

5. Discretely tunable optofluidic compound microlenses

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Nanoscale directional etching features and mechanism of HF/HNO3 etchant;Journal of Micromechanics and Microengineering;2021-07-22

2. All-Solid Ionic Eye;Journal of Applied Mechanics;2020-12-17

3. Hemispherical cavities on silicon substrates: an overview of micro fabrication techniques;Materials Research Express;2018-04-13

4. Bonded Hemishell Approach to Encapsulate Microdevices in Spheroidal Packages;MEMS and Nanotechnology, Volume 8;2014-07-10

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