Author:
Sekimoto M.,Ozawa A.,Ohkubo T.,Yoshihara H.
Publisher
The Japan Society of Applied Physics
Cited by
2 articles.
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1. Mask for Proximity X-Ray Lithography;Handbook of Photomask Manufacturing Technology;2005-04-07
2. Fabrication of X-ray masks and applications for optical switch molding;Sensors and Actuators A: Physical;2003-11