Room-temperature wafer bonding of LiNbO3 and SiO2 using a modified surface activated bonding method
Author:
Publisher
IOP Publishing
Subject
General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering
Link
http://stacks.iop.org/1347-4065/57/i=6S1/a=06HJ12/pdf
Reference40 articles.
1. Optical and electro-optical properties of submicrometer lithium niobate slab waveguides prepared by crystal ion slicing and wafer bonding
2. Electro–optically tunable microring resonators in lithium niobate
3. Lithium niobate on insulator (LNOI) for micro-photonic devices
4. Low loss ridge waveguides in lithium niobate thin films by optical grade diamond blade dicing
5. 110 GHz CMOS compatible thin film LiNbO3 modulator on silicon
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