Inductively coupled plasma etching of the GaAs nanowire array based on self-assembled SiO2 nanospheres-Reference-Cited by-同舟云学术

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Inductively coupled plasma etching of the GaAs nanowire array based on self-assembled SiO2 nanospheres

Published:2018-12-12 Issue:1 Volume:58 Page:010908
ISSN:0021-4922
Container-title:Japanese Journal of Applied Physics
language:
Short-container-title:Jpn. J. Appl. Phys.

Author:

Liu Yun,Peng Xincun,Wang Zhidong,Zhang Tao,Yu Yun,Zou Jijun,Deng Wenjuan,Zhu Zhifu

Funder

National Natural Science Foundation of China

Publisher

IOP Publishing

Subject

General Physics and Astronomy,Physics and Astronomy (miscellaneous),General Engineering

Link

http://stacks.iop.org/1347-4065/58/i=1/a=010908/pdf

Reference32 articles.

1. High optical quality GaN nanopillar arrays

2. Imprinted large-scale high density polymer nanopillars for organic solar cells

3. Three-dimensional nanopillar-array photovoltaics on low-cost and flexible substrates

4. Biomimetic Antireflective Si Nanopillar Arrays

5. Periodic Si Nanopillar Arrays Fabricated by Colloidal Lithography and Catalytic Etching for Broadband and Omnidirectional Elimination of Fresnel Reflection

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1. Optical absorption enhancement of the GaInAsSb nanopillar arrays for infrared detector;Modern Physics Letters B;2023-09-22

2. Etching of TiO2 nanopillar arrays by nanosphere lithography for broadband infrared antireflection applications;Infrared Physics & Technology;2023-01

3. Recent Advances in Vertically Aligned Nanowires for Photonics Applications;Micromachines;2020-07-26

4. Reversibly Erasable Broadband Omnidirectional Antireflection Coatings Inspired by Inclined Conical Structures on Blue-Tailed Forest Hawk Dragonfly Wings;ACS Applied Materials & Interfaces;2020-02-07

5. Deep, vertical etching for GaAs using inductively coupled plasma/reactive ion etching;Journal of Vacuum Science & Technology B;2020-01

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